Electrical Engineering and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Global Model of Ar, O_2, Cl_2, and Ar/O_2 High Density Plasma Discharges

C. Lee and Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M94/49
1994

BibTeX citation:

@techreport{Lee:M94/49,
    Author = {Lee, C. and Lieberman, Michael A.},
    Title = {Global Model of Ar, O_2, Cl_2, and Ar/O_2 High Density Plasma Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1994},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1994/2582.html},
    Number = {UCB/ERL M94/49}
}

EndNote citation:

%0 Report
%A Lee, C.
%A Lieberman, Michael A.
%T Global Model of Ar, O_2, Cl_2, and Ar/O_2 High Density Plasma Discharges
%I EECS Department, University of California, Berkeley
%D 1994
%@ UCB/ERL M94/49
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1994/2582.html
%F Lee:M94/49