Optical Proximity Correction for Resolution Enhancement Technology

David M. Newmark

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M94/34
1994

Advisor: Andrew R. Neureuther


BibTeX citation:

@phdthesis{Newmark:M94/34,
    Author = {Newmark, David M.},
    Title = {Optical Proximity Correction for Resolution Enhancement Technology},
    School = {EECS Department, University of California, Berkeley},
    Year = {1994},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1994/2556.html},
    Number = {UCB/ERL M94/34}
}

EndNote citation:

%0 Thesis
%A Newmark, David M.
%T Optical Proximity Correction for Resolution Enhancement Technology
%I EECS Department, University of California, Berkeley
%D 1994
%@ UCB/ERL M94/34
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1994/2556.html
%F Newmark:M94/34