David M. Newmark
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M94/34
May 1994
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/ERL-94-34.pdf
Advisor: Andrew R. Neureuther
BibTeX citation:
@phdthesis{Newmark:M94/34, Author = {Newmark, David M.}, Title = {Optical Proximity Correction for Resolution Enhancement Technology}, School = {EECS Department, University of California, Berkeley}, Year = {1994}, Month = {May}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2556.html}, Number = {UCB/ERL M94/34} }
EndNote citation:
%0 Thesis %A Newmark, David M. %T Optical Proximity Correction for Resolution Enhancement Technology %I EECS Department, University of California, Berkeley %D 1994 %@ UCB/ERL M94/34 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1994/2556.html %F Newmark:M94/34