Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Optical Proximity Correction for Resolution Enhancement Technology

David M. Newmark

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M94/34
1994

Advisor: Andrew R. Neureuther


BibTeX citation:

@phdthesis{Newmark:M94/34,
    Author = {Newmark, David M.},
    Title = {Optical Proximity Correction for Resolution Enhancement Technology},
    School = {EECS Department, University of California, Berkeley},
    Year = {1994},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1994/2556.html},
    Number = {UCB/ERL M94/34}
}

EndNote citation:

%0 Thesis
%A Newmark, David M.
%T Optical Proximity Correction for Resolution Enhancement Technology
%I EECS Department, University of California, Berkeley
%D 1994
%@ UCB/ERL M94/34
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1994/2556.html
%F Newmark:M94/34