Verification of Frequency Scaling Laws for Capacitive RF Discharges Using Two- Dimensional Simulations

V. Vahedi, Charles K. (Ned) Birdsall, Michael A. Lieberman, G. DiPeso and T.D. Rognlien

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/146
December 1992

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/ERL-92-146.pdf

BibTeX citation:

@techreport{Vahedi:M92/146,
    Author = {Vahedi, V. and Birdsall, Charles K. (Ned) and Lieberman, Michael A. and DiPeso, G. and Rognlien, T.D.},
    Title = {Verification of Frequency Scaling Laws for Capacitive RF Discharges Using Two- Dimensional Simulations},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1992},
    Month = {Dec},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2248.html},
    Number = {UCB/ERL M92/146}
}

EndNote citation:

%0 Report
%A Vahedi, V.
%A Birdsall, Charles K. (Ned)
%A Lieberman, Michael A.
%A DiPeso, G.
%A Rognlien, T.D.
%T Verification of Frequency Scaling Laws for Capacitive RF Discharges Using Two- Dimensional Simulations
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/146
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2248.html
%F Vahedi:M92/146