Design of a 5th Harmonic Generator for a Nd+:YAG Laser Source for Optical Lithography
L. Leinbaugh
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/144
1992
BibTeX citation:
@techreport{Leinbaugh:M92/144,
Author = {L. Leinbaugh},
Title = {Design of a 5th Harmonic Generator for a Nd+:YAG Laser Source for Optical Lithography},
Institution = {EECS Department, University of California, Berkeley},
Year = {1992},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/2246.html},
Number = {UCB/ERL M92/144}
}
EndNote citation:
%0 Report %A Leinbaugh, L. %T Design of a 5th Harmonic Generator for a Nd+:YAG Laser Source for Optical Lithography %I EECS Department, University of California, Berkeley %D 1992 %@ UCB/ERL M92/144 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/2246.html %F Leinbaugh:M92/144