L. Leinbaugh
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/144
December 1992
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/ERL-92-144.pdf
BibTeX citation:
@techreport{Leinbaugh:M92/144, Author = {Leinbaugh, L.}, Title = {Design of a 5th Harmonic Generator for a Nd+:YAG Laser Source for Optical Lithography}, Institution = {EECS Department, University of California, Berkeley}, Year = {1992}, Month = {Dec}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2246.html}, Number = {UCB/ERL M92/144} }
EndNote citation:
%0 Report %A Leinbaugh, L. %T Design of a 5th Harmonic Generator for a Nd+:YAG Laser Source for Optical Lithography %I EECS Department, University of California, Berkeley %D 1992 %@ UCB/ERL M92/144 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2246.html %F Leinbaugh:M92/144