MTCAD: An Integrated Framework of Manufacturing Equipment Models and TCAD
M. Hosseini
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/136
1992
BibTeX citation:
@techreport{Hosseini:M92/136,
Author = {M. Hosseini},
Title = {MTCAD: An Integrated Framework of Manufacturing Equipment Models and TCAD},
Institution = {EECS Department, University of California, Berkeley},
Year = {1992},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/2236.html},
Number = {UCB/ERL M92/136}
}
EndNote citation:
%0 Report %A Hosseini, M. %T MTCAD: An Integrated Framework of Manufacturing Equipment Models and TCAD %I EECS Department, University of California, Berkeley %D 1992 %@ UCB/ERL M92/136 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/2236.html %F Hosseini:M92/136