Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Computer Aided Design Tools for Phase-Shift Masks and Spatial Filtering

D.M. Newmark

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/132
1992


BibTeX citation:

@techreport{Newmark:M92/132,
    Author = {Newmark, D.M.},
    Title = {Computer Aided Design Tools for Phase-Shift Masks and Spatial Filtering},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1992},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/2228.html},
    Number = {UCB/ERL M92/132}
}

EndNote citation:

%0 Report
%A Newmark, D.M.
%T Computer Aided Design Tools for Phase-Shift Masks and Spatial Filtering
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/132
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/2228.html
%F Newmark:M92/132