Computer Aided Design Tools for Phase-Shift Masks and Spatial Filtering
D.M. Newmark
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/132
1992
BibTeX citation:
@techreport{Newmark:M92/132,
Author = {D.M. Newmark},
Title = {Computer Aided Design Tools for Phase-Shift Masks and Spatial Filtering},
Institution = {EECS Department, University of California, Berkeley},
Year = {1992},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/2228.html},
Number = {UCB/ERL M92/132}
}
EndNote citation:
%0 Report %A Newmark, D.M. %T Computer Aided Design Tools for Phase-Shift Masks and Spatial Filtering %I EECS Department, University of California, Berkeley %D 1992 %@ UCB/ERL M92/132 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/2228.html %F Newmark:M92/132