Sequential Optimization in Semiconductor Manufacturing
J. Thomson
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/118
1992
BibTeX citation:
@techreport{Thomson:M92/118,
Author = {Thomson, J.},
Title = {Sequential Optimization in Semiconductor Manufacturing},
Institution = {EECS Department, University of California, Berkeley},
Year = {1992},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/2194.html},
Number = {UCB/ERL M92/118}
}
EndNote citation:
%0 Report %A Thomson, J. %T Sequential Optimization in Semiconductor Manufacturing %I EECS Department, University of California, Berkeley %D 1992 %@ UCB/ERL M92/118 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/2194.html %F Thomson:M92/118