Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Sequential Optimization in Semiconductor Manufacturing

J. Thomson

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/118
1992


BibTeX citation:

@techreport{Thomson:M92/118,
    Author = {Thomson, J.},
    Title = {Sequential Optimization in Semiconductor Manufacturing},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1992},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/2194.html},
    Number = {UCB/ERL M92/118}
}

EndNote citation:

%0 Report
%A Thomson, J.
%T Sequential Optimization in Semiconductor Manufacturing
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/118
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/2194.html
%F Thomson:M92/118