Sequential Optimization in Semiconductor Manufacturing

J. Thomson

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/118
October 1992

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/ERL-92-118.pdf

BibTeX citation:

@techreport{Thomson:M92/118,
    Author = {Thomson, J.},
    Title = {Sequential Optimization in Semiconductor Manufacturing},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1992},
    Month = {Oct},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2194.html},
    Number = {UCB/ERL M92/118}
}

EndNote citation:

%0 Report
%A Thomson, J.
%T Sequential Optimization in Semiconductor Manufacturing
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/118
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2194.html
%F Thomson:M92/118