Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Special Issues in Semiconductor Manufacturing III

Costas J. Spanos, B. Bombay, S. Cunningham, Z. Daoud, J. Helmsen, J. King, H-C. Liu, D. Newmark, J. Noriega-Asturias, J. Thomson, C. Yu, E. Boskin and D. Hebert

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/84
1992


BibTeX citation:

@techreport{Spanos:M92/84,
    Author = {Spanos, Costas J. and Bombay, B. and Cunningham, S. and Daoud, Z. and Helmsen, J. and King, J. and Liu, H-C. and Newmark, D. and Noriega-Asturias, J. and Thomson, J. and Yu, C. and Boskin, E. and Hebert, D.},
    Title = {Special Issues in Semiconductor Manufacturing III},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1992},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/2117.html},
    Number = {UCB/ERL M92/84}
}

EndNote citation:

%0 Report
%A Spanos, Costas J.
%A Bombay, B.
%A Cunningham, S.
%A Daoud, Z.
%A Helmsen, J.
%A King, J.
%A Liu, H-C.
%A Newmark, D.
%A Noriega-Asturias, J.
%A Thomson, J.
%A Yu, C.
%A Boskin, E.
%A Hebert, D.
%T Special Issues in Semiconductor Manufacturing III
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/84
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/2117.html
%F Spanos:M92/84