Special Issues in Semiconductor Manufacturing III

Costas J. Spanos, B. Bombay, S. Cunningham, Z. Daoud, J. Helmsen, J. King, H-C. Liu, D. Newmark, J. Noriega-Asturias, J. Thomson, C. Yu, E. Boskin and D. Hebert

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/84
1992


BibTeX citation:

@techreport{Spanos:M92/84,
    Author = {Spanos, Costas J. and Bombay, B. and Cunningham, S. and Daoud, Z. and Helmsen, J. and King, J. and Liu, H-C. and Newmark, D. and Noriega-Asturias, J. and Thomson, J. and Yu, C. and Boskin, E. and Hebert, D.},
    Title = {Special Issues in Semiconductor Manufacturing III},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1992},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/2117.html},
    Number = {UCB/ERL M92/84}
}

EndNote citation:

%0 Report
%A Spanos, Costas J.
%A Bombay, B.
%A Cunningham, S.
%A Daoud, Z.
%A Helmsen, J.
%A King, J.
%A Liu, H-C.
%A Newmark, D.
%A Noriega-Asturias, J.
%A Thomson, J.
%A Yu, C.
%A Boskin, E.
%A Hebert, D.
%T Special Issues in Semiconductor Manufacturing III
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/84
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/2117.html
%F Spanos:M92/84