S. Leang
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/70
July 1992
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/ERL-92-70.pdf
BibTeX citation:
@techreport{Leang:M92/70, Author = {Leang, S.}, Title = {Supervisory Control System for a Photo- lithographic Workcell}, Institution = {EECS Department, University of California, Berkeley}, Year = {1992}, Month = {Jul}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2079.html}, Number = {UCB/ERL M92/70} }
EndNote citation:
%0 Report %A Leang, S. %T Supervisory Control System for a Photo- lithographic Workcell %I EECS Department, University of California, Berkeley %D 1992 %@ UCB/ERL M92/70 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1992/2079.html %F Leang:M92/70