Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Supervisory Control System for a Photo- lithographic Workcell

S. Leang

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/70
1992


BibTeX citation:

@techreport{Leang:M92/70,
    Author = {Leang, S.},
    Title = {Supervisory Control System for a Photo- lithographic Workcell},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1992},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/2079.html},
    Number = {UCB/ERL M92/70}
}

EndNote citation:

%0 Report
%A Leang, S.
%T Supervisory Control System for a Photo- lithographic Workcell
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/70
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/2079.html
%F Leang:M92/70