A Three-Dimensional Physically-Based Model for LPCVD
S.F-H. Lee
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/69
1992
BibTeX citation:
@techreport{Lee:M92/69,
Author = {Lee, S.F-H.},
Title = {A Three-Dimensional Physically-Based Model for LPCVD},
Institution = {EECS Department, University of California, Berkeley},
Year = {1992},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/2078.html},
Number = {UCB/ERL M92/69}
}
EndNote citation:
%0 Report %A Lee, S.F-H. %T A Three-Dimensional Physically-Based Model for LPCVD %I EECS Department, University of California, Berkeley %D 1992 %@ UCB/ERL M92/69 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/2078.html %F Lee:M92/69