An Introduction to Semiconductor Manufacturing and Markets

P.K. Schank and Lawrence A. Rowe

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/35
1992


BibTeX citation:

@techreport{Schank:M92/35,
    Author = {Schank, P.K. and Rowe, Lawrence A.},
    Title = {An Introduction to Semiconductor Manufacturing and Markets},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1992},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/2000.html},
    Number = {UCB/ERL M92/35}
}

EndNote citation:

%0 Report
%A Schank, P.K.
%A Rowe, Lawrence A.
%T An Introduction to Semiconductor Manufacturing and Markets
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/35
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/2000.html
%F Schank:M92/35