An Introduction to Semiconductor Manufacturing and Markets
P.K. Schank and Lawrence A. Rowe
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/35
1992
BibTeX citation:
@techreport{Schank:M92/35,
Author = {Schank, P.K. and Rowe, Lawrence A.},
Title = {An Introduction to Semiconductor Manufacturing and Markets},
Institution = {EECS Department, University of California, Berkeley},
Year = {1992},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/2000.html},
Number = {UCB/ERL M92/35}
}
EndNote citation:
%0 Report %A Schank, P.K. %A Rowe, Lawrence A. %T An Introduction to Semiconductor Manufacturing and Markets %I EECS Department, University of California, Berkeley %D 1992 %@ UCB/ERL M92/35 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/2000.html %F Schank:M92/35