Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

RF Discharge Impedance Measurements and Comparison to a Discharge Model

A.H. Sato and Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/34
1992


BibTeX citation:

@techreport{Sato:M92/34,
    Author = {Sato, A.H. and Lieberman, Michael A.},
    Title = {RF Discharge Impedance Measurements and Comparison to a Discharge Model},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1992},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/1998.html},
    Number = {UCB/ERL M92/34}
}

EndNote citation:

%0 Report
%A Sato, A.H.
%A Lieberman, Michael A.
%T RF Discharge Impedance Measurements and Comparison to a Discharge Model
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/34
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/1998.html
%F Sato:M92/34