RF Discharge Impedance Measurements and Comparison to a Discharge Model
A.H. Sato and Michael A. Lieberman
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/34
1992
BibTeX citation:
@techreport{Sato:M92/34,
Author = {Sato, A.H. and Lieberman, Michael A.},
Title = {RF Discharge Impedance Measurements and Comparison to a Discharge Model},
Institution = {EECS Department, University of California, Berkeley},
Year = {1992},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/1998.html},
Number = {UCB/ERL M92/34}
}
EndNote citation:
%0 Report %A Sato, A.H. %A Lieberman, Michael A. %T RF Discharge Impedance Measurements and Comparison to a Discharge Model %I EECS Department, University of California, Berkeley %D 1992 %@ UCB/ERL M92/34 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/1998.html %F Sato:M92/34