Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Issues in Deep-UV Lithography Using Pulsed Laser Light Sources

William N. Partlo

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M92/14
1992

Advisor: William G. Oldham


BibTeX citation:

@phdthesis{Partlo:M92/14,
    Author = {Partlo, William N.},
    Title = {Issues in Deep-UV Lithography Using Pulsed Laser Light Sources},
    School = {EECS Department, University of California, Berkeley},
    Year = {1992},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/1954.html},
    Number = {UCB/ERL M92/14}
}

EndNote citation:

%0 Thesis
%A Partlo, William N.
%T Issues in Deep-UV Lithography Using Pulsed Laser Light Sources
%I EECS Department, University of California, Berkeley
%D 1992
%@ UCB/ERL M92/14
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1992/1954.html
%F Partlo:M92/14