Electrical Engineering and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Investigation of Process Technology Elements

William G. Oldham and Andrew R. Neureuther

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M91/66
1991

BibTeX citation:

@techreport{Oldham:M91/66,
    Author = {Oldham, William G. and Neureuther, Andrew R.},
    Title = {Investigation of Process Technology Elements},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1991},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1991/1789.html},
    Number = {UCB/ERL M91/66}
}

EndNote citation:

%0 Report
%A Oldham, William G.
%A Neureuther, Andrew R.
%T Investigation of Process Technology Elements
%I EECS Department, University of California, Berkeley
%D 1991
%@ UCB/ERL M91/66
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1991/1789.html
%F Oldham:M91/66