Manufacturing-Based IC Process and Device Simulation
T.L. Luan
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M91/55
1991
BibTeX citation:
@techreport{Luan:M91/55,
Author = {Luan, T.L.},
Title = {Manufacturing-Based IC Process and Device Simulation},
Institution = {EECS Department, University of California, Berkeley},
Year = {1991},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1991/1774.html},
Number = {UCB/ERL M91/55}
}
EndNote citation:
%0 Report %A Luan, T.L. %T Manufacturing-Based IC Process and Device Simulation %I EECS Department, University of California, Berkeley %D 1991 %@ UCB/ERL M91/55 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1991/1774.html %F Luan:M91/55
