Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Automated Malfunction Diagnosis of Integrated Circuit Manufacturing Equipment

Gary S. May

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M91/33
1991

Advisor: Costas J. Spanos


BibTeX citation:

@phdthesis{May:M91/33,
    Author = {May, Gary S.},
    Title = {Automated Malfunction Diagnosis of Integrated Circuit Manufacturing Equipment},
    School = {EECS Department, University of California, Berkeley},
    Year = {1991},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1991/1736.html},
    Number = {UCB/ERL M91/33}
}

EndNote citation:

%0 Thesis
%A May, Gary S.
%T Automated Malfunction Diagnosis of Integrated Circuit Manufacturing Equipment
%I EECS Department, University of California, Berkeley
%D 1991
%@ UCB/ERL M91/33
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1991/1736.html
%F May:M91/33