Automated Malfunction Diagnosis of Integrated Circuit Manufacturing Equipment
Gary S. May
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M91/33
1991
Advisor: Costas J. Spanos
BibTeX citation:
@phdthesis{May:M91/33,
Author = {May, Gary S.},
Title = {Automated Malfunction Diagnosis of Integrated Circuit Manufacturing Equipment},
School = {EECS Department, University of California, Berkeley},
Year = {1991},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1991/1736.html},
Number = {UCB/ERL M91/33}
}
EndNote citation:
%0 Thesis %A May, Gary S. %T Automated Malfunction Diagnosis of Integrated Circuit Manufacturing Equipment %I EECS Department, University of California, Berkeley %D 1991 %@ UCB/ERL M91/33 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1991/1736.html %F May:M91/33