Electrical Engineering and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Special Issues in Semiconductor Manufacturing

Costas J. Spanos, R. Chen, S. Leang and N. Tam

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M91/8
1991

BibTeX citation:

@techreport{Spanos:M91/8,
    Author = {Spanos, Costas J. and Chen, R. and Leang, S. and Tam, N.},
    Title = {Special Issues in Semiconductor Manufacturing},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1991},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1991/1688.html},
    Number = {UCB/ERL M91/8}
}

EndNote citation:

%0 Report
%A Spanos, Costas J.
%A Chen, R.
%A Leang, S.
%A Tam, N.
%T Special Issues in Semiconductor Manufacturing
%I EECS Department, University of California, Berkeley
%D 1991
%@ UCB/ERL M91/8
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1991/1688.html
%F Spanos:M91/8