Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Effects of DC Bias on the Kinetics and Electrical Properties of Silicon Dioxide Grown in an Electron Cyclotron Resonance Plasma

D.A. Carl, D.W. Hess, Michael A. Lieberman, T.D. Nguyen and R. Gronsky

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M91/5
1991


BibTeX citation:

@techreport{Carl:M91/5,
    Author = {Carl, D.A. and Hess, D.W. and Lieberman, Michael A. and Nguyen, T.D. and Gronsky, R.},
    Title = {Effects of DC Bias on the Kinetics and Electrical Properties of Silicon Dioxide Grown in an Electron Cyclotron Resonance Plasma},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1991},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1991/1679.html},
    Number = {UCB/ERL M91/5}
}

EndNote citation:

%0 Report
%A Carl, D.A.
%A Hess, D.W.
%A Lieberman, Michael A.
%A Nguyen, T.D.
%A Gronsky, R.
%T Effects of DC Bias on the Kinetics and Electrical Properties of Silicon Dioxide Grown in an Electron Cyclotron Resonance Plasma
%I EECS Department, University of California, Berkeley
%D 1991
%@ UCB/ERL M91/5
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1991/1679.html
%F Carl:M91/5