Carl J. Galewski
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/122
December 1990
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/ERL-90-122.pdf
Advisor: William G. Oldham
BibTeX citation:
@phdthesis{Galewski:M90/122, Author = {Galewski, Carl J.}, Title = {Hot-Wall Silicon Epitaxy}, School = {EECS Department, University of California, Berkeley}, Year = {1990}, Month = {Dec}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1669.html}, Number = {UCB/ERL M90/122} }
EndNote citation:
%0 Thesis %A Galewski, Carl J. %T Hot-Wall Silicon Epitaxy %I EECS Department, University of California, Berkeley %D 1990 %@ UCB/ERL M90/122 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1669.html %F Galewski:M90/122