Hot-Wall Silicon Epitaxy

Carl J. Galewski

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/122
1990

Advisor: William G. Oldham

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BibTeX citation:

@phdthesis{Galewski:M90/122,
    Author = {Galewski, Carl J.},
    Title = {Hot-Wall Silicon Epitaxy},
    School = {EECS Department, University of California, Berkeley},
    Year = {1990},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1669.html},
    Number = {UCB/ERL M90/122}
}

EndNote citation:

%0 Thesis
%A Galewski, Carl J.
%T Hot-Wall Silicon Epitaxy
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/122
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1669.html
%F Galewski:M90/122

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