Sheath Motion in a Capacitively Coupled Radio Frequency Discharges
B.P. Wood, Michael A. Lieberman and Allan J. Lichtenberg
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/83
1990
BibTeX citation:
@techreport{Wood:M90/83,
Author = {Wood, B.P. and Lieberman, Michael A. and Lichtenberg, Allan J.},
Title = {Sheath Motion in a Capacitively Coupled Radio Frequency Discharges},
Institution = {EECS Department, University of California, Berkeley},
Year = {1990},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1586.html},
Number = {UCB/ERL M90/83}
}
EndNote citation:
%0 Report %A Wood, B.P. %A Lieberman, Michael A. %A Lichtenberg, Allan J. %T Sheath Motion in a Capacitively Coupled Radio Frequency Discharges %I EECS Department, University of California, Berkeley %D 1990 %@ UCB/ERL M90/83 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1586.html %F Wood:M90/83