Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Sheath Motion in a Capacitively Coupled Radio Frequency Discharges

B.P. Wood, Michael A. Lieberman and Allan J. Lichtenberg

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/83
1990


BibTeX citation:

@techreport{Wood:M90/83,
    Author = {Wood, B.P. and Lieberman, Michael A. and Lichtenberg, Allan J.},
    Title = {Sheath Motion in a Capacitively Coupled Radio Frequency Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1990},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1586.html},
    Number = {UCB/ERL M90/83}
}

EndNote citation:

%0 Report
%A Wood, B.P.
%A Lieberman, Michael A.
%A Lichtenberg, Allan J.
%T Sheath Motion in a Capacitively Coupled Radio Frequency Discharges
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/83
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1586.html
%F Wood:M90/83