Axial RF Electric Field Intensity and Ion Density During Low to High Mode Transition in Argon Electron Cyclotron Resonance Discharges

D.A. Carl, M.C. Williamson, Michael A. Lieberman and Allan J. Lichtenberg

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/81
September 1990

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/ERL-90-81.pdf

BibTeX citation:

@techreport{Carl:M90/81,
    Author = {Carl, D.A. and Williamson, M.C. and Lieberman, Michael A. and Lichtenberg, Allan J.},
    Title = {Axial RF Electric Field Intensity and Ion Density During Low to High Mode Transition in Argon Electron Cyclotron Resonance Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1990},
    Month = {Sep},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1574.html},
    Number = {UCB/ERL M90/81}
}

EndNote citation:

%0 Report
%A Carl, D.A.
%A Williamson, M.C.
%A Lieberman, Michael A.
%A Lichtenberg, Allan J.
%T Axial RF Electric Field Intensity and Ion Density During Low to High Mode Transition in Argon Electron Cyclotron Resonance Discharges
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/81
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1990/1574.html
%F Carl:M90/81