Monitoring, Maintenance and Diagnosis in a Computer-Integrated Environment for Semiconductor Manufacturing
Norman H. Chang
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/61
1990
Advisor: Costas J. Spanos
BibTeX citation:
@phdthesis{Chang:M90/61,
Author = {Chang, Norman H.},
Title = {Monitoring, Maintenance and Diagnosis in a Computer-Integrated Environment for Semiconductor Manufacturing},
School = {EECS Department, University of California, Berkeley},
Year = {1990},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1526.html},
Number = {UCB/ERL M90/61}
}
EndNote citation:
%0 Thesis %A Chang, Norman H. %T Monitoring, Maintenance and Diagnosis in a Computer-Integrated Environment for Semiconductor Manufacturing %I EECS Department, University of California, Berkeley %D 1990 %@ UCB/ERL M90/61 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1526.html %F Chang:M90/61