Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

A One Dimensional Collisional Model for Plasma Immersion Ion Implantation

V. Vahedi, Michael A. Lieberman, M.V. Alves, J.P. Verboncoeur and Charles K. (Ned) Birdsall

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/60
1990


BibTeX citation:

@techreport{Vahedi:M90/60,
    Author = {Vahedi, V. and Lieberman, Michael A. and Alves, M.V. and Verboncoeur, J.P. and Birdsall, Charles K. (Ned)},
    Title = {A One Dimensional Collisional Model for Plasma Immersion Ion Implantation},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1990},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1521.html},
    Number = {UCB/ERL M90/60}
}

EndNote citation:

%0 Report
%A Vahedi, V.
%A Lieberman, Michael A.
%A Alves, M.V.
%A Verboncoeur, J.P.
%A Birdsall, Charles K. (Ned)
%T A One Dimensional Collisional Model for Plasma Immersion Ion Implantation
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/60
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1521.html
%F Vahedi:M90/60