A One Dimensional Collisional Model for Plasma Immersion Ion Implantation
V. Vahedi, Michael A. Lieberman, M.V. Alves, J.P. Verboncoeur and Charles K. (Ned) Birdsall
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/60
1990
BibTeX citation:
@techreport{Vahedi:M90/60,
Author = {V. Vahedi and Michael A. Lieberman and M.V. Alves and J.P. Verboncoeur and Charles K. (Ned) Birdsall},
Title = {A One Dimensional Collisional Model for Plasma Immersion Ion Implantation},
Institution = {EECS Department, University of California, Berkeley},
Year = {1990},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1521.html},
Number = {UCB/ERL M90/60}
}
EndNote citation:
%0 Report %A Vahedi, V. %A Lieberman, Michael A. %A Alves, M.V. %A Verboncoeur, J.P. %A Birdsall, Charles K. (Ned) %T A One Dimensional Collisional Model for Plasma Immersion Ion Implantation %I EECS Department, University of California, Berkeley %D 1990 %@ UCB/ERL M90/60 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1521.html %F Vahedi:M90/60