Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Power Absorption Corresponding to Ion Losses in Parallel Plate RF Discharges

A.H. Sato

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/59
1990


BibTeX citation:

@techreport{Sato:M90/59,
    Author = {Sato, A.H.},
    Title = {Power Absorption Corresponding to Ion Losses in Parallel Plate RF Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1990},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1520.html},
    Number = {UCB/ERL M90/59}
}

EndNote citation:

%0 Report
%A Sato, A.H.
%T Power Absorption Corresponding to Ion Losses in Parallel Plate RF Discharges
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/59
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1520.html
%F Sato:M90/59