Power Absorption Corresponding to Ion Losses in Parallel Plate RF Discharges

A.H. Sato

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/59
1990


BibTeX citation:

@techreport{Sato:M90/59,
    Author = {Sato, A.H.},
    Title = {Power Absorption Corresponding to Ion Losses in Parallel Plate RF Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1990},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1520.html},
    Number = {UCB/ERL M90/59}
}

EndNote citation:

%0 Report
%A Sato, A.H.
%T Power Absorption Corresponding to Ion Losses in Parallel Plate RF Discharges
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/59
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1520.html
%F Sato:M90/59