Power Absorption Corresponding to Ion Losses in Parallel Plate RF Discharges
A.H. Sato
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/59
1990
BibTeX citation:
@techreport{Sato:M90/59,
Author = {Sato, A.H.},
Title = {Power Absorption Corresponding to Ion Losses in Parallel Plate RF Discharges},
Institution = {EECS Department, University of California, Berkeley},
Year = {1990},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1520.html},
Number = {UCB/ERL M90/59}
}
EndNote citation:
%0 Report %A Sato, A.H. %T Power Absorption Corresponding to Ion Losses in Parallel Plate RF Discharges %I EECS Department, University of California, Berkeley %D 1990 %@ UCB/ERL M90/59 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1520.html %F Sato:M90/59