Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Model of Magnetically Enhanced Capacitive RF Discharges

Michael A. Lieberman, Allan J. Lichtenberg and S.E. Savas

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/58
1990


BibTeX citation:

@techreport{Lieberman:M90/58,
    Author = {Lieberman, Michael A. and Lichtenberg, Allan J. and Savas, S.E.},
    Title = {Model of Magnetically Enhanced Capacitive RF Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1990},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1517.html},
    Number = {UCB/ERL M90/58}
}

EndNote citation:

%0 Report
%A Lieberman, Michael A.
%A Lichtenberg, Allan J.
%A Savas, S.E.
%T Model of Magnetically Enhanced Capacitive RF Discharges
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/58
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1517.html
%F Lieberman:M90/58