Model of Magnetically Enhanced Capacitive RF Discharges
Michael A. Lieberman, Allan J. Lichtenberg and S.E. Savas
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/58
1990
BibTeX citation:
@techreport{Lieberman:M90/58,
Author = {Lieberman, Michael A. and Lichtenberg, Allan J. and Savas, S.E.},
Title = {Model of Magnetically Enhanced Capacitive RF Discharges},
Institution = {EECS Department, University of California, Berkeley},
Year = {1990},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1517.html},
Number = {UCB/ERL M90/58}
}
EndNote citation:
%0 Report %A Lieberman, Michael A. %A Lichtenberg, Allan J. %A Savas, S.E. %T Model of Magnetically Enhanced Capacitive RF Discharges %I EECS Department, University of California, Berkeley %D 1990 %@ UCB/ERL M90/58 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1517.html %F Lieberman:M90/58