Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Sheath Voltage Ratio for Asymmetric RF Discharges

M.V. Alves, Michael A. Lieberman, V. Vahedi and Charles K. (Ned) Birdsall

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/56
1990


BibTeX citation:

@techreport{Alves:M90/56,
    Author = {Alves, M.V. and Lieberman, Michael A. and Vahedi, V. and Birdsall, Charles K. (Ned)},
    Title = {Sheath Voltage Ratio for Asymmetric RF Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1990},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1511.html},
    Number = {UCB/ERL M90/56}
}

EndNote citation:

%0 Report
%A Alves, M.V.
%A Lieberman, Michael A.
%A Vahedi, V.
%A Birdsall, Charles K. (Ned)
%T Sheath Voltage Ratio for Asymmetric RF Discharges
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/56
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1511.html
%F Alves:M90/56