Sheath Voltage Ratio for Asymmetric RF Discharges
M.V. Alves, Michael A. Lieberman, V. Vahedi and Charles K. (Ned) Birdsall
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/56
1990
BibTeX citation:
@techreport{Alves:M90/56,
Author = {Alves, M.V. and Lieberman, Michael A. and Vahedi, V. and Birdsall, Charles K. (Ned)},
Title = {Sheath Voltage Ratio for Asymmetric RF Discharges},
Institution = {EECS Department, University of California, Berkeley},
Year = {1990},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1511.html},
Number = {UCB/ERL M90/56}
}
EndNote citation:
%0 Report %A Alves, M.V. %A Lieberman, Michael A. %A Vahedi, V. %A Birdsall, Charles K. (Ned) %T Sheath Voltage Ratio for Asymmetric RF Discharges %I EECS Department, University of California, Berkeley %D 1990 %@ UCB/ERL M90/56 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1511.html %F Alves:M90/56