Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Electron Beam Probe Measurements of Electric Fields in RF Discharges

A.H. Sato and Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/49
1990


BibTeX citation:

@techreport{Sato:M90/49,
    Author = {Sato, A.H. and Lieberman, Michael A.},
    Title = {Electron Beam Probe Measurements of Electric Fields in RF Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1990},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1501.html},
    Number = {UCB/ERL M90/49}
}

EndNote citation:

%0 Report
%A Sato, A.H.
%A Lieberman, Michael A.
%T Electron Beam Probe Measurements of Electric Fields in RF Discharges
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/49
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1501.html
%F Sato:M90/49