Electron Beam Probe Measurements of Electric Fields in RF Discharges
A.H. Sato and Michael A. Lieberman
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/49
1990
BibTeX citation:
@techreport{Sato:M90/49,
Author = {Sato, A.H. and Lieberman, Michael A.},
Title = {Electron Beam Probe Measurements of Electric Fields in RF Discharges},
Institution = {EECS Department, University of California, Berkeley},
Year = {1990},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1501.html},
Number = {UCB/ERL M90/49}
}
EndNote citation:
%0 Report %A Sato, A.H. %A Lieberman, Michael A. %T Electron Beam Probe Measurements of Electric Fields in RF Discharges %I EECS Department, University of California, Berkeley %D 1990 %@ UCB/ERL M90/49 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1501.html %F Sato:M90/49