Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Special Issues in Semiconductor Manufacturing

Costas J. Spanos, E.D. Boskin, Y.K. Fong, T. Garfinkel, H. Guo, C.J. Hegarty, T.H. Hu, S.F. Lee, T.L. Luan, G.S. May, J. Ramirez and E. Rosenbaum

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/8
1990

This report describes a program for the evaluation of the performance of Shewhart control charts with supplementary runs rules. This program was implemented in Fortran.


BibTeX citation:

@techreport{Spanos:M90/8,
    Author = {Spanos, Costas J. and Boskin, E.D. and Fong, Y.K. and Garfinkel, T. and Guo, H. and Hegarty, C.J. and Hu, T.H. and Lee, S.F. and Luan, T.L. and May, G.S. and Ramirez, J. and Rosenbaum, E.},
    Title = {Special Issues in Semiconductor Manufacturing},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1990},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1394.html},
    Number = {UCB/ERL M90/8},
    Abstract = {This report describes a program for the evaluation of the performance of Shewhart control charts with supplementary runs rules. This program was implemented in Fortran.}
}

EndNote citation:

%0 Report
%A Spanos, Costas J.
%A Boskin, E.D.
%A Fong, Y.K.
%A Garfinkel, T.
%A Guo, H.
%A Hegarty, C.J.
%A Hu, T.H.
%A Lee, S.F.
%A Luan, T.L.
%A May, G.S.
%A Ramirez, J.
%A Rosenbaum, E.
%T Special Issues in Semiconductor Manufacturing
%I EECS Department, University of California, Berkeley
%D 1990
%@ UCB/ERL M90/8
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1394.html
%F Spanos:M90/8