Special Issues in Semiconductor Manufacturing
Costas J. Spanos, E.D. Boskin, Y.K. Fong, T. Garfinkel, H. Guo, C.J. Hegarty, T.H. Hu, S.F. Lee, T.L. Luan, G.S. May, J. Ramirez and E. Rosenbaum
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M90/8
1990
This report describes a program for the evaluation of the performance of Shewhart control charts with supplementary runs rules. This program was implemented in Fortran.
BibTeX citation:
@techreport{Spanos:M90/8,
Author = {Costas J. Spanos and E.D. Boskin and Y.K. Fong and T. Garfinkel and H. Guo and C.J. Hegarty and T.H. Hu and S.F. Lee and T.L. Luan and G.S. May and J. Ramirez and E. Rosenbaum},
Title = {Special Issues in Semiconductor Manufacturing},
Institution = {EECS Department, University of California, Berkeley},
Year = {1990},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1394.html},
Number = {UCB/ERL M90/8}
}
EndNote citation:
%0 Report %A Spanos, Costas J. %A Boskin, E.D. %A Fong, Y.K. %A Garfinkel, T. %A Guo, H. %A Hegarty, C.J. %A Hu, T.H. %A Lee, S.F. %A Luan, T.L. %A May, G.S. %A Ramirez, J. %A Rosenbaum, E. %T Special Issues in Semiconductor Manufacturing %I EECS Department, University of California, Berkeley %D 1990 %@ UCB/ERL M90/8 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1990/1394.html %F Spanos:M90/8