J. Ramirez
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M89/139
December 1989
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/ERL-89-139.pdf
BibTeX citation:
@techreport{Ramirez:M89/139, Author = {Ramirez, J.}, Title = {Electrical and Optical Test Structures for the Investigation of Lithography over Topography}, Institution = {EECS Department, University of California, Berkeley}, Year = {1989}, Month = {Dec}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1375.html}, Number = {UCB/ERL M89/139} }
EndNote citation:
%0 Report %A Ramirez, J. %T Electrical and Optical Test Structures for the Investigation of Lithography over Topography %I EECS Department, University of California, Berkeley %D 1989 %@ UCB/ERL M89/139 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1375.html %F Ramirez:M89/139