Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Electrical and Optical Test Structures for the Investigation of Lithography over Topography

J. Ramirez

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M89/139
1989


BibTeX citation:

@techreport{Ramirez:M89/139,
    Author = {Ramirez, J.},
    Title = {Electrical and Optical Test Structures for the Investigation of Lithography over Topography},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1989},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1989/1375.html},
    Number = {UCB/ERL M89/139}
}

EndNote citation:

%0 Report
%A Ramirez, J.
%T Electrical and Optical Test Structures for the Investigation of Lithography over Topography
%I EECS Department, University of California, Berkeley
%D 1989
%@ UCB/ERL M89/139
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1989/1375.html
%F Ramirez:M89/139