Bias Voltage in Finite Length, Cylindrical and Coaxial RF Discharges

Michael A. Lieberman and S.E. Savas

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M89/121
October 1989

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/ERL-89-121.pdf

BibTeX citation:

@techreport{Lieberman:M89/121,
    Author = {Lieberman, Michael A. and Savas, S.E.},
    Title = {Bias Voltage in Finite Length, Cylindrical and Coaxial RF Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1989},
    Month = {Oct},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1352.html},
    Number = {UCB/ERL M89/121}
}

EndNote citation:

%0 Report
%A Lieberman, Michael A.
%A Savas, S.E.
%T Bias Voltage in Finite Length, Cylindrical and Coaxial RF Discharges
%I EECS Department, University of California, Berkeley
%D 1989
%@ UCB/ERL M89/121
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1352.html
%F Lieberman:M89/121