Bias Voltage in Finite Length, Cylindrical and Coaxial RF Discharges
Michael A. Lieberman and S.E. Savas
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M89/121
1989
BibTeX citation:
@techreport{Lieberman:M89/121,
Author = {Lieberman, Michael A. and Savas, S.E.},
Title = {Bias Voltage in Finite Length, Cylindrical and Coaxial RF Discharges},
Institution = {EECS Department, University of California, Berkeley},
Year = {1989},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1989/1352.html},
Number = {UCB/ERL M89/121}
}
EndNote citation:
%0 Report %A Lieberman, Michael A. %A Savas, S.E. %T Bias Voltage in Finite Length, Cylindrical and Coaxial RF Discharges %I EECS Department, University of California, Berkeley %D 1989 %@ UCB/ERL M89/121 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1989/1352.html %F Lieberman:M89/121