Evolution of the Microfabrication Facility at Berkeley

K. Voros and P.K. Ko

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M89/109
September 1989

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/ERL-89-109.pdf

The Berkeley Microfabrication Facility has been in operation since 1962. It is a shared facility that supports a wide variety of experimental research in microelectronics and other fields. Currently, 46 faculty investigators and 153 graduate students use the facility. The Microlab is used principally to fabricate devices and structures that cannot be obtained through commercial sources. Principal operators are graduate students. A professional and technical staff of 13 full-time equivalents supports the processes, equipment and facility.

Policies and operating procedures have developed over the years to provide economical support for diverse technical procedures. This report describes our important policies and procedures, including those relating to training, safety, maintenance, budgeting, technology upgrades, and sharing of sophisticated research equipment. Faculty and students consider the Microlab to be an excellent and indispensable tool in their research.

BibTeX citation:

@techreport{Voros:M89/109,
    Author = {Voros, K. and Ko, P.K.},
    Title = {Evolution of the Microfabrication Facility at Berkeley},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1989},
    Month = {Sep},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1326.html},
    Number = {UCB/ERL M89/109},
    Abstract = {The Berkeley Microfabrication Facility has been in operation
since 1962. It is a shared facility that supports a wide variety
of experimental research in microelectronics and other fields.
Currently, 46 faculty investigators and 153 graduate students
use the facility. The Microlab is used principally to fabricate
devices and structures that cannot be obtained through commercial
sources. Principal operators are graduate students. A professional
and technical staff of 13 full-time equivalents supports the
processes, equipment and facility. 

Policies and operating procedures have developed over the years to
provide economical support for diverse technical procedures. This
report describes our important policies and procedures, including
those relating to training, safety, maintenance, budgeting,
technology upgrades, and sharing of sophisticated research
equipment. Faculty and students consider the Microlab to be an
excellent and indispensable tool in their research.}
}

EndNote citation:

%0 Report
%A Voros, K.
%A Ko, P.K.
%T Evolution of the Microfabrication Facility at Berkeley
%I EECS Department, University of California, Berkeley
%D 1989
%@ UCB/ERL M89/109
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1989/1326.html
%F Voros:M89/109