Test Structures for N-Level Metal
D.M. Drako and D.E. Lyons
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M89/76
1989
BibTeX citation:
@techreport{Drako:M89/76,
Author = {Drako, D.M. and Lyons, D.E.},
Title = {Test Structures for N-Level Metal},
Institution = {EECS Department, University of California, Berkeley},
Year = {1989},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1989/1265.html},
Number = {UCB/ERL M89/76}
}
EndNote citation:
%0 Report %A Drako, D.M. %A Lyons, D.E. %T Test Structures for N-Level Metal %I EECS Department, University of California, Berkeley %D 1989 %@ UCB/ERL M89/76 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1989/1265.html %F Drako:M89/76