Planar Multilevel Metallization Using Additive Pattern Transfer

D.E. Lyons

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M89/75
1989


BibTeX citation:

@techreport{Lyons:M89/75,
    Author = {Lyons, D.E.},
    Title = {Planar Multilevel Metallization Using Additive Pattern Transfer},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1989},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1989/1264.html},
    Number = {UCB/ERL M89/75}
}

EndNote citation:

%0 Report
%A Lyons, D.E.
%T Planar Multilevel Metallization Using Additive Pattern Transfer
%I EECS Department, University of California, Berkeley
%D 1989
%@ UCB/ERL M89/75
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1989/1264.html
%F Lyons:M89/75