Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Simulation of Topography Scattering for Optical Lithography with the Connection Machine

J.K. Gamelin

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M89/71
1989


BibTeX citation:

@techreport{Gamelin:M89/71,
    Author = {Gamelin, J.K.},
    Title = {Simulation of Topography Scattering for Optical Lithography with the Connection Machine},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1989},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1989/1259.html},
    Number = {UCB/ERL M89/71}
}

EndNote citation:

%0 Report
%A Gamelin, J.K.
%T Simulation of Topography Scattering for Optical Lithography with the Connection Machine
%I EECS Department, University of California, Berkeley
%D 1989
%@ UCB/ERL M89/71
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1989/1259.html
%F Gamelin:M89/71