Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Effects of Excimer Laser Radiation Properties on Condenser Illumination for Microlithography

W.N. Partlo

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M89/68
1989


BibTeX citation:

@techreport{Partlo:M89/68,
    Author = {Partlo, W.N.},
    Title = {Effects of Excimer Laser Radiation Properties on Condenser Illumination for Microlithography},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1989},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1989/1253.html},
    Number = {UCB/ERL M89/68}
}

EndNote citation:

%0 Report
%A Partlo, W.N.
%T Effects of Excimer Laser Radiation Properties on Condenser Illumination for Microlithography
%I EECS Department, University of California, Berkeley
%D 1989
%@ UCB/ERL M89/68
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1989/1253.html
%F Partlo:M89/68