Effects of Excimer Laser Radiation Properties on Condenser Illumination for Microlithography
W.N. Partlo
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M89/68
1989
BibTeX citation:
@techreport{Partlo:M89/68,
Author = {Partlo, W.N.},
Title = {Effects of Excimer Laser Radiation Properties on Condenser Illumination for Microlithography},
Institution = {EECS Department, University of California, Berkeley},
Year = {1989},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1989/1253.html},
Number = {UCB/ERL M89/68}
}
EndNote citation:
%0 Report %A Partlo, W.N. %T Effects of Excimer Laser Radiation Properties on Condenser Illumination for Microlithography %I EECS Department, University of California, Berkeley %D 1989 %@ UCB/ERL M89/68 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1989/1253.html %F Partlo:M89/68