Model of Plasma Immersion Ion Implantation

Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M89/30
1989


BibTeX citation:

@techreport{Lieberman:M89/30,
    Author = {Lieberman, Michael A.},
    Title = {Model of Plasma Immersion Ion Implantation},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1989},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1989/1195.html},
    Number = {UCB/ERL M89/30}
}

EndNote citation:

%0 Report
%A Lieberman, Michael A.
%T Model of Plasma Immersion Ion Implantation
%I EECS Department, University of California, Berkeley
%D 1989
%@ UCB/ERL M89/30
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1989/1195.html
%F Lieberman:M89/30