Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Model of Plasma Immersion Ion Implantation

Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M89/30
1989


BibTeX citation:

@techreport{Lieberman:M89/30,
    Author = {Lieberman, Michael A.},
    Title = {Model of Plasma Immersion Ion Implantation},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1989},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1989/1195.html},
    Number = {UCB/ERL M89/30}
}

EndNote citation:

%0 Report
%A Lieberman, Michael A.
%T Model of Plasma Immersion Ion Implantation
%I EECS Department, University of California, Berkeley
%D 1989
%@ UCB/ERL M89/30
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1989/1195.html
%F Lieberman:M89/30