Axial Distribution of Optical Emission in a Planar Magnetron
L. Gu and Michael A. Lieberman
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M88/6
1988
BibTeX citation:
@techreport{Gu:M88/6,
Author = {Gu, L. and Lieberman, Michael A.},
Title = {Axial Distribution of Optical Emission in a Planar Magnetron},
Institution = {EECS Department, University of California, Berkeley},
Year = {1988},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/999.html},
Number = {UCB/ERL M88/6}
}
EndNote citation:
%0 Report %A Gu, L. %A Lieberman, Michael A. %T Axial Distribution of Optical Emission in a Planar Magnetron %I EECS Department, University of California, Berkeley %D 1988 %@ UCB/ERL M88/6 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/999.html %F Gu:M88/6