Electrical Engineering and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Macroscopic Modelling of R.F. Plasma Discharges

G.R. Misium, Allan J. Lichtenberg and Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M88/86
1988

BibTeX citation:

@techreport{Misium:M88/86,
    Author = {Misium, G.R. and Lichtenberg, Allan J. and Lieberman, Michael A.},
    Title = {Macroscopic Modelling of R.F. Plasma Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1988},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/1143.html},
    Number = {UCB/ERL M88/86}
}

EndNote citation:

%0 Report
%A Misium, G.R.
%A Lichtenberg, Allan J.
%A Lieberman, Michael A.
%T Macroscopic Modelling of R.F. Plasma Discharges
%I EECS Department, University of California, Berkeley
%D 1988
%@ UCB/ERL M88/86
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/1143.html
%F Misium:M88/86