Macroscopic Modelling of R.F. Plasma Discharges

G.R. Misium, Allan J. Lichtenberg and Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M88/86
1988


BibTeX citation:

@techreport{Misium:M88/86,
    Author = {Misium, G.R. and Lichtenberg, Allan J. and Lieberman, Michael A.},
    Title = {Macroscopic Modelling of R.F. Plasma Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1988},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/1143.html},
    Number = {UCB/ERL M88/86}
}

EndNote citation:

%0 Report
%A Misium, G.R.
%A Lichtenberg, Allan J.
%A Lieberman, Michael A.
%T Macroscopic Modelling of R.F. Plasma Discharges
%I EECS Department, University of California, Berkeley
%D 1988
%@ UCB/ERL M88/86
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/1143.html
%F Misium:M88/86