Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Cavity Perturbation Measurement of Plasma Density in Complex Geometry R.F. Discharges

R.M. Moroney, Allan J. Lichtenberg and Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M88/81
1988


BibTeX citation:

@techreport{Moroney:M88/81,
    Author = {Moroney, R.M. and Lichtenberg, Allan J. and Lieberman, Michael A.},
    Title = {Cavity Perturbation Measurement of Plasma Density in Complex Geometry R.F. Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1988},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/1134.html},
    Number = {UCB/ERL M88/81}
}

EndNote citation:

%0 Report
%A Moroney, R.M.
%A Lichtenberg, Allan J.
%A Lieberman, Michael A.
%T Cavity Perturbation Measurement of Plasma Density in Complex Geometry R.F. Discharges
%I EECS Department, University of California, Berkeley
%D 1988
%@ UCB/ERL M88/81
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/1134.html
%F Moroney:M88/81