Cavity Perturbation Measurement of Plasma Density in Complex Geometry R.F. Discharges

R.M. Moroney, Allan J. Lichtenberg and Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M88/81
1988


BibTeX citation:

@techreport{Moroney:M88/81,
    Author = {Moroney, R.M. and Lichtenberg, Allan J. and Lieberman, Michael A.},
    Title = {Cavity Perturbation Measurement of Plasma Density in Complex Geometry R.F. Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1988},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/1134.html},
    Number = {UCB/ERL M88/81}
}

EndNote citation:

%0 Report
%A Moroney, R.M.
%A Lichtenberg, Allan J.
%A Lieberman, Michael A.
%T Cavity Perturbation Measurement of Plasma Density in Complex Geometry R.F. Discharges
%I EECS Department, University of California, Berkeley
%D 1988
%@ UCB/ERL M88/81
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/1134.html
%F Moroney:M88/81