Spin Coating Simulation Using Finite Element Method
R. Sutardja
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M88/70
1988
BibTeX citation:
@techreport{Sutardja:M88/70,
Author = {Sutardja, R.},
Title = {Spin Coating Simulation Using Finite Element Method},
Institution = {EECS Department, University of California, Berkeley},
Year = {1988},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/1117.html},
Number = {UCB/ERL M88/70}
}
EndNote citation:
%0 Report %A Sutardja, R. %T Spin Coating Simulation Using Finite Element Method %I EECS Department, University of California, Berkeley %D 1988 %@ UCB/ERL M88/70 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/1117.html %F Sutardja:M88/70