Dynamics of a Collisional Capacitive R.F. Sheath

Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M88/62
September 1988

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/ERL-88-62.pdf

BibTeX citation:

@techreport{Lieberman:M88/62,
    Author = {Lieberman, Michael A.},
    Title = {Dynamics of a Collisional Capacitive R.F. Sheath},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1988},
    Month = {Sep},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1100.html},
    Number = {UCB/ERL M88/62}
}

EndNote citation:

%0 Report
%A Lieberman, Michael A.
%T Dynamics of a Collisional Capacitive R.F. Sheath
%I EECS Department, University of California, Berkeley
%D 1988
%@ UCB/ERL M88/62
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1100.html
%F Lieberman:M88/62