Electrical Probing of Test Structures for Optical Lithography

J. Fleischman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M88/60
1988


BibTeX citation:

@techreport{Fleischman:M88/60,
    Author = {Fleischman, J.},
    Title = {Electrical Probing of Test Structures for Optical Lithography},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1988},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/1098.html},
    Number = {UCB/ERL M88/60}
}

EndNote citation:

%0 Report
%A Fleischman, J.
%T Electrical Probing of Test Structures for Optical Lithography
%I EECS Department, University of California, Berkeley
%D 1988
%@ UCB/ERL M88/60
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/1098.html
%F Fleischman:M88/60