Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Electrical Probing of Test Structures for Optical Lithography

J. Fleischman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M88/60
1988


BibTeX citation:

@techreport{Fleischman:M88/60,
    Author = {Fleischman, J.},
    Title = {Electrical Probing of Test Structures for Optical Lithography},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1988},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/1098.html},
    Number = {UCB/ERL M88/60}
}

EndNote citation:

%0 Report
%A Fleischman, J.
%T Electrical Probing of Test Structures for Optical Lithography
%I EECS Department, University of California, Berkeley
%D 1988
%@ UCB/ERL M88/60
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/1098.html
%F Fleischman:M88/60