Self-Consistent Stochastic Electron Heating in Radio Frequency Discharges
C.G. Goedde, Allan J. Lichtenberg and Michael A. Lieberman
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M88/29
1988
BibTeX citation:
@techreport{Goedde:M88/29,
Author = {Goedde, C.G. and Lichtenberg, Allan J. and Lieberman, Michael A.},
Title = {Self-Consistent Stochastic Electron Heating in Radio Frequency Discharges},
Institution = {EECS Department, University of California, Berkeley},
Year = {1988},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/1034.html},
Number = {UCB/ERL M88/29}
}
EndNote citation:
%0 Report %A Goedde, C.G. %A Lichtenberg, Allan J. %A Lieberman, Michael A. %T Self-Consistent Stochastic Electron Heating in Radio Frequency Discharges %I EECS Department, University of California, Berkeley %D 1988 %@ UCB/ERL M88/29 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/1034.html %F Goedde:M88/29