Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Self-Consistent Stochastic Electron Heating in Radio Frequency Discharges

C.G. Goedde, Allan J. Lichtenberg and Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M88/29
1988


BibTeX citation:

@techreport{Goedde:M88/29,
    Author = {Goedde, C.G. and Lichtenberg, Allan J. and Lieberman, Michael A.},
    Title = {Self-Consistent Stochastic Electron Heating in Radio Frequency Discharges},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1988},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/1034.html},
    Number = {UCB/ERL M88/29}
}

EndNote citation:

%0 Report
%A Goedde, C.G.
%A Lichtenberg, Allan J.
%A Lieberman, Michael A.
%T Self-Consistent Stochastic Electron Heating in Radio Frequency Discharges
%I EECS Department, University of California, Berkeley
%D 1988
%@ UCB/ERL M88/29
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/1034.html
%F Goedde:M88/29