Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Finite Element Methods for Process Simulation Application to Silicon Oxidation

Pantas Sutardja

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M88/26
1988

Advisor: William G. Oldham


BibTeX citation:

@phdthesis{Sutardja:M88/26,
    Author = {Sutardja, Pantas},
    Title = {Finite Element Methods for Process Simulation Application to Silicon Oxidation},
    School = {EECS Department, University of California, Berkeley},
    Year = {1988},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/1030.html},
    Number = {UCB/ERL M88/26}
}

EndNote citation:

%0 Thesis
%A Sutardja, Pantas
%T Finite Element Methods for Process Simulation Application to Silicon Oxidation
%I EECS Department, University of California, Berkeley
%D 1988
%@ UCB/ERL M88/26
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/1030.html
%F Sutardja:M88/26