Characterization and Modeling of Resist Development with Surfactants

C. Zee

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M88/11
1988


BibTeX citation:

@techreport{Zee:M88/11,
    Author = {Zee, C.},
    Title = {Characterization and Modeling of Resist Development with Surfactants},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1988},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/1005.html},
    Number = {UCB/ERL M88/11}
}

EndNote citation:

%0 Report
%A Zee, C.
%T Characterization and Modeling of Resist Development with Surfactants
%I EECS Department, University of California, Berkeley
%D 1988
%@ UCB/ERL M88/11
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/1005.html
%F Zee:M88/11