C. Zee
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M88/11
January 1988
http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/ERL-88-11.pdf
BibTeX citation:
@techreport{Zee:M88/11, Author = {Zee, C.}, Title = {Characterization and Modeling of Resist Development with Surfactants}, Institution = {EECS Department, University of California, Berkeley}, Year = {1988}, Month = {Jan}, URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1005.html}, Number = {UCB/ERL M88/11} }
EndNote citation:
%0 Report %A Zee, C. %T Characterization and Modeling of Resist Development with Surfactants %I EECS Department, University of California, Berkeley %D 1988 %@ UCB/ERL M88/11 %U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1988/1005.html %F Zee:M88/11