Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Characterization and Modeling of Resist Development with Surfactants

C. Zee

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M88/11
1988


BibTeX citation:

@techreport{Zee:M88/11,
    Author = {Zee, C.},
    Title = {Characterization and Modeling of Resist Development with Surfactants},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1988},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/1005.html},
    Number = {UCB/ERL M88/11}
}

EndNote citation:

%0 Report
%A Zee, C.
%T Characterization and Modeling of Resist Development with Surfactants
%I EECS Department, University of California, Berkeley
%D 1988
%@ UCB/ERL M88/11
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1988/1005.html
%F Zee:M88/11