Analytical Solution for Capacitive R.F. Sheath

Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M87/71
February 1987

http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/ERL-87-71.pdf

BibTeX citation:

@techreport{Lieberman:M87/71,
    Author = {Lieberman, Michael A.},
    Title = {Analytical Solution for Capacitive R.F. Sheath},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1987},
    Month = {Feb},
    URL = {http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/945.html},
    Number = {UCB/ERL M87/71}
}

EndNote citation:

%0 Report
%A Lieberman, Michael A.
%T Analytical Solution for Capacitive R.F. Sheath
%I EECS Department, University of California, Berkeley
%D 1987
%@ UCB/ERL M87/71
%U http://www2.eecs.berkeley.edu/Pubs/TechRpts/1987/945.html
%F Lieberman:M87/71