Radial Current Distribution at a Planar Magnetron Cathode
A.E. Wendt, Michael A. Lieberman and H. Meuth
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M87/66
1987
BibTeX citation:
@techreport{Wendt:M87/66,
Author = {Wendt, A.E. and Lieberman, Michael A. and Meuth, H.},
Title = {Radial Current Distribution at a Planar Magnetron Cathode},
Institution = {EECS Department, University of California, Berkeley},
Year = {1987},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1987/938.html},
Number = {UCB/ERL M87/66}
}
EndNote citation:
%0 Report %A Wendt, A.E. %A Lieberman, Michael A. %A Meuth, H. %T Radial Current Distribution at a Planar Magnetron Cathode %I EECS Department, University of California, Berkeley %D 1987 %@ UCB/ERL M87/66 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1987/938.html %F Wendt:M87/66