Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

Basic RF Discharge Model

Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M87/65
1987


BibTeX citation:

@techreport{Lieberman:M87/65,
    Author = {Lieberman, Michael A.},
    Title = {Basic RF Discharge Model},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1987},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1987/937.html},
    Number = {UCB/ERL M87/65}
}

EndNote citation:

%0 Report
%A Lieberman, Michael A.
%T Basic RF Discharge Model
%I EECS Department, University of California, Berkeley
%D 1987
%@ UCB/ERL M87/65
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1987/937.html
%F Lieberman:M87/65