Basic RF Discharge Model

Michael A. Lieberman

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M87/65
1987


BibTeX citation:

@techreport{Lieberman:M87/65,
    Author = {Lieberman, Michael A.},
    Title = {Basic RF Discharge Model},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1987},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1987/937.html},
    Number = {UCB/ERL M87/65}
}

EndNote citation:

%0 Report
%A Lieberman, Michael A.
%T Basic RF Discharge Model
%I EECS Department, University of California, Berkeley
%D 1987
%@ UCB/ERL M87/65
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1987/937.html
%F Lieberman:M87/65