Basic RF Discharge Model
Michael A. Lieberman
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M87/65
1987
BibTeX citation:
@techreport{Lieberman:M87/65,
Author = {Lieberman, Michael A.},
Title = {Basic RF Discharge Model},
Institution = {EECS Department, University of California, Berkeley},
Year = {1987},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1987/937.html},
Number = {UCB/ERL M87/65}
}
EndNote citation:
%0 Report %A Lieberman, Michael A. %T Basic RF Discharge Model %I EECS Department, University of California, Berkeley %D 1987 %@ UCB/ERL M87/65 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1987/937.html %F Lieberman:M87/65