An Expert System for Polysilicon Recipe Generation
K-K. Lin
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M87/50
1987
BibTeX citation:
@techreport{Lin:M87/50,
Author = {Lin, K-K.},
Title = {An Expert System for Polysilicon Recipe Generation},
Institution = {EECS Department, University of California, Berkeley},
Year = {1987},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1987/914.html},
Number = {UCB/ERL M87/50}
}
EndNote citation:
%0 Report %A Lin, K-K. %T An Expert System for Polysilicon Recipe Generation %I EECS Department, University of California, Berkeley %D 1987 %@ UCB/ERL M87/50 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1987/914.html %F Lin:M87/50