Electrical Engineering
      and Computer Sciences

Electrical Engineering and Computer Sciences

COLLEGE OF ENGINEERING

UC Berkeley

MOS Processes in the Microfabrication Laboratory

K. Voros and P.K. Ko

EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M87/12
1987


BibTeX citation:

@techreport{Voros:M87/12,
    Author = {Voros, K. and Ko, P.K.},
    Title = {MOS Processes in the Microfabrication Laboratory},
    Institution = {EECS Department, University of California, Berkeley},
    Year = {1987},
    URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1987/839.html},
    Number = {UCB/ERL M87/12}
}

EndNote citation:

%0 Report
%A Voros, K.
%A Ko, P.K.
%T MOS Processes in the Microfabrication Laboratory
%I EECS Department, University of California, Berkeley
%D 1987
%@ UCB/ERL M87/12
%U http://www.eecs.berkeley.edu/Pubs/TechRpts/1987/839.html
%F Voros:M87/12