MOS Processes in the Microfabrication Laboratory
K. Voros and P.K. Ko
EECS Department
University of California, Berkeley
Technical Report No. UCB/ERL M87/12
1987
BibTeX citation:
@techreport{Voros:M87/12,
Author = {Voros, K. and Ko, P.K.},
Title = {MOS Processes in the Microfabrication Laboratory},
Institution = {EECS Department, University of California, Berkeley},
Year = {1987},
URL = {http://www.eecs.berkeley.edu/Pubs/TechRpts/1987/839.html},
Number = {UCB/ERL M87/12}
}
EndNote citation:
%0 Report %A Voros, K. %A Ko, P.K. %T MOS Processes in the Microfabrication Laboratory %I EECS Department, University of California, Berkeley %D 1987 %@ UCB/ERL M87/12 %U http://www.eecs.berkeley.edu/Pubs/TechRpts/1987/839.html %F Voros:M87/12